一种场间电磁屏蔽的阵列化电流体喷头
Release time:2025-01-04
Hits:
- Disigner of the Invention:
- 陈建魁,汪国振,陈伟,尹周平
- Type of Patent:
- Invent
- Application Number:
- CN202311715503.2
- Number of Inventors:
- 4
- Application Date:
- 2023-12-14
- Publication Date:
- 2024-02-06
- Pre One:一种基板气浮平台控制方法及系统