CN

曾双双ZENG SHUANG SHUANG

研究员(自然科学)    Supervisor of Doctorate Candidates    Supervisor of Master's Candidates

  • Professional Title:研究员(自然科学)
  • Gender:Male
  • Status:Employed
  • Department:IC College
  • Education Level:Postgraduate (Doctoral)
  • Degree:Doctoral Degree in Philosophy

Research Focus

Current position: Home > Research Focus

新型纳米图案化技术

Hits:

采用固态纳米孔、纳米缝隙等在自支撑氮化硅薄膜制备得到的纳米结构为掩膜,实现免光刻胶和免化学溶剂的新型纳米图案化技术。