Large-area High Aspect-ratio Plasmonic Interference Lithography Utilizing Single High-k Mode
- Indexed by:Journal paper
- Journal:ACS Nano
- Volume:10
- Issue:4
- Page Number:4039–4045
- Date of Publication:2016-04-13
- Links to published journals:https://pubs.acs.org/doi/10.1021/acsnano.5b06137