多焦点激光诱导分离脆性透射材料机理及关键技术的研究
- Type of Research Outcome:New Technology & New Process
- Nature of Project:NSFC General Program
- Supported by:National Natural Science Foundation of China (NSFC)
- Project level:国家级
- Project Number:No.51675205
- Classification of Disciplines:Engineering
- First-Level Discipline:Mechanical Engineering
- Date of Project Approval:2016-01-01
- Date of Project Completion:2019-12-31
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复杂曲面微结构的投影式激光振镜扫描刻蚀新原理、 新方法