多焦点激光精密诱导分离脆性透射材料机理研究
- Leading Scientist:段军
- Type of Research Outcome:New Technology & New Process
- Nature of Project:351
- Supported by:Technology programs of the Government Departments
- Project level:部级
- Project Number:20130142110059
- Date of Project Approval:2014-01-01
- Date of Project Completion:2015-12-31
Pre One:
多焦点激光诱导分离脆性透射材料机理及关键技术的研究
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数控紫外微加工机床与技术