·Paper Publications
Mechanistic Modeling Study of Atomic Layer Deposition Process Optimization in a Fluidized Bed Reactor
Release time:2019-09-03 Hits:
First Author: Chen-Long Duan
Correspondence Author: Rong Chen*
Co-author: Peng-Hui Zhu, Zhang Deng, Yun Li, Bin Shan, Hai-Sheng Fang, Guang Feng
Journal: Journal of Vacuum Science & Technology A
Volume: 35
Issue: 1
Page Number: 01B102