3DIC BEOL热物性测试及特性技术研究
Release time:2025-03-20
Hits:
- Status:
- 结题
- Supported by:
- 华为科技有限公司
- Nature of Project:
- Research Funded by Enterprises and Institutes for Citizens (Other Programs)
- Supported by:
- Enterprises and institutions shall entrust scientific and technological projects
- Project level:
- Other
- Classification of Disciplines:
- Engineering
- First-Level Discipline:
- Power Engineering and Engineering Thermophysics
- Date of Project Completion:
- 2024-12-02
- Date of Project Initiation:
- 2024-01-01
- Subsidy Amount:
- 87.0
- Pre One:频域热反射法测量平台升级为方脉冲热源法测量平台
- Next One:频域热反射法测量平台升级为方脉冲热源法测量平台