·Research Projects
浸没光刻机动力学及超稳定结构设计方法
Release time:2020-05-10  Hits:
Leading Scientist: 姜伟
Supported by: 科技部
Type of Research Outcome: Theoretical research results
Nature of Project: National mega-project (extra large-scale integrated circuit)
Supported by: National Major Special Programs
Project level: 国家级
Project Number: 2017ZX02101007-002
Classification of Disciplines: Engineering
First-Level Discipline: Mechanical Engineering
Date of Project Approval: 2017-01-01
Date of Project Completion: 2020-12-31