Wei Jiang

·Research Projects

Current position: 英文主页 > Scientific Research > Research Projects
浸没光刻机动力学及超稳定结构设计方法
Release time:2020-05-10  Hits:

Leading Scientist: 姜伟

Supported by: 科技部

Type of Research Outcome: Theoretical research results

Nature of Project: National mega-project (extra large-scale integrated circuit)

Supported by: National Major Special Programs

Project level: 国家级

Project Number: 2017ZX02101007-002

Classification of Disciplines: Engineering

First-Level Discipline: Mechanical Engineering

Date of Project Approval: 2017-01-01

Date of Project Completion: 2020-12-31