Jianguo Liu
·Paper Publications
Focused laser lithographic system for efficient and cross-scale fabrication of large and 3D micro-patterns
Release time:2022-09-24 Hits:
Indexed by: Journal paper
Journal: Optics and Lasers in Engineering
Included Journals: SCI、EI
Discipline: Engineering
Funded by: NSFC
Document Type: J
Volume: 107
Page Number: 335-341
Date of Publication: 2018-08-15