Jianguo Liu

·Paper Publications

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Focused laser lithographic system for efficient and cross-scale fabrication of large and 3D micro-patterns
Release time:2018-09-18  Hits:

Indexed by: Journal paper

First Author: Jun Ai

Correspondence Author: Jianguo Liu

Co-author: Ming Lv, Ming Jiang, Jianguo Liu*, Xiaoyan Zeng

Journal: Optics and Lasers in Engineering

Included Journals: EI、SCI

Discipline: Engineering

Document Type: J

Volume: 107

Page Number: 335-341

Date of Publication: 2018-05-16