Donglin Ma

·Paper Publications

Current position: 英文主页 > Scientific Research > Paper Publications
Wei Tan, Huiru Ji, Yan Mo, Donglin Ma*, “Automatic design of an extreme ultraviolet lithography objective system based on the Seidel aberration theory,” Applied Optics 61(29), 8633-8640 (2022).
Release time:2024-04-03  Hits: