华中科技大学主页平台管理系统 SHU XUE WEN--英文主页-- Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon

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Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon

Release time:2022-05-15 Hits:

Journal: MATERIALS & DESIGN

ISSN No.: 0264-1275

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