童浩

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教授     博士生导师    

所在单位:集成电路学院

学历:研究生(博士)毕业

学位:博士学位

毕业院校:华中科技大学

学科:微电子学与固体电子学
曾获荣誉:
2024    华中科技大学青年五四奖章
2022    华为奥林帕斯先锋奖
2020    湖北省技术发明一等奖(排名第2)
2013    湖北省年度“十大科技事件”
2013    湖北省优秀博士学位论文
2014    湖北省优秀学士学位论文指导教师
2015    华中科技大学教师教学竞赛二等奖
2017    华中科技大学光学与电子信息学院“我最喜爱的教师班主任“
2020    华中科技大学光学与电子信息学院突出贡献一等奖

Improved multilevel storage capacity in Ge2Sb2Te5-based phase-change memory using a high-aspect-ratio lateral structure
发布时间:2023-08-21  点击次数:

论文类型:期刊论文
第一作者:赵锐哲
通讯作者:童浩
合写作者:缪向水,程晓敏,陈子琪,王伦,何明泽
发表刊物:Science China Materials
所属单位:华中科技大学
学科门类:工学
一级学科:电子科学与技术
文献类型:J
关键字:multilevel cell, high aspect ratio, nanowires, 3D phase-change memory, Ge2Sb2Te5
DOI码:10.1007/s40843-022-2028-7
发表时间:4466-06-01
摘要:Further improvement of storage density is a key challenge for the application of phase-change memory (PCM) in storage-class memory. However, for PCM, storage density improvements include feature size scaling down and multilevel cell (MLC) operation, potentially causing thermal crosstalk issues and phase separation issues, respectively. To address these challenges, we propose a high-aspect-ratio (25:1) lateral nanowire (NW) PCM device with conventional chalcogenide Ge2Sb2Te5 (GST-225) to realize stable MLC operations, i.e., low intra- and inter-cell variability and low resistance drift (coefficient = 0.009). The improved MLC performance is attributed to the high aspect ratio, which enables precise control of the amorphous region because of sidewall confinement, as confirmed by transmission electron microscopy analysis. In summary, the NW devices provide guidance for the design of future high-aspect-ratio threedimensional PCM devices with MLC capability.
发布期刊链接:https://link.springer.com/article/10.1007/s40843-022-2028-7#author-information