Liangcheng Tu

·Paper Publications

Current position: 英文主页 > Scientific Research > Paper Publications
06 Wen-Jie Wu,Dan-Dan Liu, Wen-Rui Qiu, Hua-Feng Liu,Fang-Jing Hu, Ji Fan, Chen-Yuan Hu, Liang-Cheng Tu*, A precise spacing-control method in MEMS packaging for capacitive accelerometer applications, J. Micromech. Microeng. 28 (2018) 125016. (8pages)
Release time:2019-03-16  Hits: