Liangcheng Tu
·Paper Publications
016 Wen-Jie Wu, Tao Zhu, Jin-Quan Liu, Ji Fan and Liang-Cheng Tu*, Polyimide-Damage-Free, CMOS-Compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation. Journal of Electronic Materials, 44 (2015) 991-998 (8pages)
Release time:2019-03-16 Hits:
-
Pre One:：
014 Wen-Hai Tan, Shan-Qing Yang, Cheng-Gang Shao, Jia Li, An-Bin Du, Bi-Fu Zhan, Qing-Lan Wang, Peng-Shun Luo, Liang-Cheng Tu, and Jun Luo, New Test of the Gravitational Inverse-Square Law at the Submillimeter Range with Dual Modulation and Compensation. Phys. Rev. Lett. 116 (2016), 131101. (15pages)
-
Next One:：
012 Ji Fan, Rui-Yuan Xing, Wen-Jie Wu, Hua-Feng Liu, Jin-Quan Liu and Liang-Cheng Tu*, Low-stress photosensitive polyimide suspended membrane for improved thermal isolation performance. J. Micromech. Microeng. 27 (2017) 115013. (7pages)