·Research Projects
基于偏振角分辨光谱分析的超薄膜在线测量方法与理论研究
Release time:2021-04-22 Hits:
Supported by: 国家自然科学基金委员会
Supported by: 国家自然科学基金面上项目
Classification of Disciplines: Engineering
First-Level Discipline: Mechanical Engineering
Date of Project Approval: 2021-01-01
Scheduled completion time: 2024-12-31
Project Approval Number: 52075206
Subsidy Amount: 58.0