·Paper Publications
Nucleation Delay in Selective Atomic Layer Deposition: Density Functional Insights Coupled Numerical Nucleation Model
Release time:2024-06-10 Hits:
Indexed by: Journal paper
First Author: Yanwei Wen
Correspondence Author: Bin Shan
Journal: J. Phys. Chem. C
Included Journals: SCI
Volume: 128
Issue: 24
Page Number: 9915–9925
Date of Publication: 2024-06-10
Impact Factor: 3.4
wen-et-al-2024-nucleation-delay-in-selective-atomic-layer-deposition-density-functional-insights-coupled-numerical.pdf