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Ar metastable particle number density of He-Ar RF capacitive discharge at atmospheric pressure
Release time:2018-10-10  Hits:

Indexed by: Journal paper

First Author: 何永乐

Correspondence Author: 左都罗

Co-author: 何永乐; 高俊; 左都罗; 王新兵

Journal: High Power Laser and Particle Beams

Affiliation of Author(s): Wuhan National Laboratory for Optoelectronics

Place of Publication: China

Document Type: J

Volume: 29

Issue: 5

Page Number: 051002-1-051002-5

ISSN No.: 1001-4322

Date of Publication: 2017-05-15

Abstract: This article presents the measurement of Ar metastable 1s_5(3s~23p~54s[3/2]_2) particle number density in He-Ar mixed gas at atmospheric pressure by the emission spectroscopy of the gas radiofrequency capacitive discharge. The important parameters of discharge plasma, gas rotational temperature, electron excitation temperature, and Ar metastable 1s_5 particle number density, are measured at different discharge powers and gas composition. The results show that gas temperature changes little at different discharge power with the content of Ar less than 5*10~3 Pa, and the range is 300-350 K. ...