华中科技大学主页平台管理系统 WU WEN JIE--英文主页-- A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer

伍文杰 Associate professor

伍文杰，男，华中科技大学物理学院副教授，Micromachines 编辑，自然科学基金委函评专家，IOP Trusted Reviewer，IEEE Member，中国微米纳米技术协会高级会员，光电子光子材料与器件学术会议学术委员。近五年作为负责人主持工信部高质量发展专项子课题、国家重点研发计划子课题、自然科学基金面上项目、自然科学基金青年基金、中国博士后特别资助（站中）、中国博士后科学基金等项目，总经费超过700万元。长期从事高端MEMS加速...Detials

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Paper Publications Current position: 英文主页 > Scientific Research > Paper Publications

A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer

Release time:2022-05-15 Hits:

Journal:Sensors and Actuators, A: Physical
ISSN No.:0924-4247

Pre One: [16] Zhang, Z., Huang, R., Wang, Z., Dong, W., Cheng, W. Steady-state temperature measurement of the piston using voltage memory. (2011) 2011 International Conference on Electric Information and Control Engineering, ICEICE 2011 - Proceedings, pp. 6130-6133.