伍文杰

个人信息Personal Information

讲师(高校)   硕士生导师  

性别:男

在职信息:在职

所在单位:物理学院

学历:研究生(博士)毕业

学位:理学博士学位

毕业院校:华中科技大学

学科:精密测量物理

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个人简介Personal Profile

伍文杰,男,华中科技大学 物理学院副教授,Micromachines 编辑,自然科学基金委函评专家,IOP Trusted Reviewer,IEEE Member,中国微米纳米技术协会高级会员,光电子光子材料与器件学术会议学术委员。近五年作为负责人主持工信部高质量发展专项子课题、国家重点研发计划子课题、自然科学基金面上项目、自然科学基金青年基金、中国博士后特别资助(站中)、中国博士后科学基金等项目,总经费超过700万元。长期从事高端MEMS加速度传感芯片及其应用研究,成功研制亚ng分辨率MEMS加速度、MEMS重力传感芯片及仪器。仪器性能国际同类领先,已进入实用化阶段。相关研究成果在Microsystems & Nanoengineering, JMEMS, SNA等业内主流期刊发表SCI学术论文40篇,申请发明专利20项(含2项美国专利)。指导学生获华中科技大学本科生优秀毕业设计、优秀毕业生、荣誉学士学位。在研课题包括亚ng分辨率高精度MEMS加速度计芯片设计、工艺与系统集成,MEMS相对重力仪芯片设计、工艺、集成与数据融合,基于人工智能的MEMS传感器结构优化设计,无人机载智能化大地测量方法。

代表性论文:(* 为通讯作者)

 1.     Fangzheng Li , Dandan Liu , Le Gao, Bingyang Cai, Lujia Yang , Yuan Wang, Chun Zhao, Wenjie Wu*, and Liangcheng Tu, Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer, Journal of Microelectromechanical Systems, 2023Accepted.

2.      Lujia Yang, Xiaochao Xu, Qian Wang, Ji’ao Tian, Yanyan Fang, Chun Zhao, Wenjie Wu*, Fangjing Hu* and Liangcheng Tu. A MEMS-Based Gravimeter for Simultaneous Vertical and Horizontal Earth Tides Measurements[C]//2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2023: 841-844.

3.     Le Gao, Fangzheng Li, Jian Zhang, Bingyang Cai, Wenjie Wu*, and Liangcheng Tu*. A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and Drift[C]//2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2023: 837-840.

 4. Dandan Liu, Wenjie Wu*, Shitao Yan, Qiangwei Xu, Yuanlei Wang, Huafeng Liu, Liangcheng Tu* In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer[J]. IEEE Sensors Journal, 2021, 21(18): 19872-19880.

5.    Wenjie Wu, Dandan Liu, Huafeng Liu, Shitao Yan, Shihao Tang, Jinquan Liu, Fangjing Hu , Ji Fan, and Liangcheng Tu*. Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism[J]. Journal of Microelectromechanical Systems, 2020, 29(5): 1322-1331.

6.      Dandan Liu ,Huafeng Liu ,Jinquan Liu, Fangjing Hu, Ji Fan, Wenjie Wu*, and Liangcheng Tu*. Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer[J]. Sensors, 2020, 20(4): 1186.

7.      Shitao Yan, Huafeng Liu, Qiangwei Xu, Dandan Liu, Mengqi Zhang, Wenjie Wu*, Liangcheng Tu*. A Method for Improving Out-of-plane Robustness of an Area-changed Capacitive Displacement Transducer Used in a Micro-accelerometer[J]. Sensors and Actuators A: Physical, 2020: 112156.

8.    Wenjie Wu, Dandan Liu, Wenrui Qiu, Huafeng Liu, Fangjing Hu, Ji Fan*, Chenyuan Hu* and Liangcheng Tu*. A precise spacing-control method in MEMS packaging for capacitive accelerometer applications[J]. Journal of Micromechanics and Microengineering, 2018, 28(12): 125016-24.

9.    Wenjie Wu, Jinquan Liu, Ji Fan, Danhua Peng, Huafeng Liu, Liangcheng Tu*. A nano-g micromachined seismic sensor for levelling-free measurements[J]. Sensors and Actuators A: Physical, 2018, 280: 238-244.

10.    Wenjie Wu, Zhu Li, JinQuan Liu, Ji Fan and LiangCheng Tu*. A nano-g MEMS accelerometer for earthquake monitoring[C]// 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017599-602.

11.    Wenjie Wu, Panpan Zheng, Jinquan Liu, Zhu Li, Ji Fan, Hufeng Liu and Liangcheng Tu*. High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer[J]. Sensors, 2017, 17(9): 2158-73.

12.    Wenjie Wu, Tao Zhu, Jinquan Liu, Ji Fan, and Liangcheng Tu*. Polyimide-damage-free, CMOS-compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation[J]. Journal of Electronic Materials, 2015, 44(3): 991-8.

13. Shihao Tang, Huafeng Liu, Shitao Yan, Xiaochao Xu, Wenjie Wu, Ji Fan, Jinquan Liu, Chenyuan Hu and Liangcheng Tu. A high-sensitivity MEMS gravimeter with a large dynamic range[J]. Microsystems & nanoengineering, 2019, 5(1), 1-11.

代表性专利

1.      中国发明专利 伍文杰、蔡冰洋、高乐、涂良成,一种基于变面积梳齿电容的 MEMS 相对重力仪探头及重力仪,202210603702.3.

2.      中国发明专利 伍文杰、高乐、李方正、涂良成,基于双路错位阵列电容位移传感的MEMS重力仪探头及重力仪,202210623975.4.

      3.   中国发明专利 伍文杰,李方正,蔡冰洋,方偲媛,彭茂军,涂良成, 一种高集成度MEMS相对重力仪, 2022116859043

      4.   中国发明专利 伍文杰,李方正,高乐,蔡冰洋,涂良成, 一种静电力平衡式MEMS加速度计及其闭环控制方法, 202310085393X

5.      中国发明专利 伍文杰、涂良成、刘骅锋、刘丹丹,一种MEMS 准零刚度的弹簧振子结构,202010513743.4.

6.      中国发明专利,伍文杰、刘丹丹、刘金全、严世涛、涂良成,一种磁反馈闭环加速度传感器及其温度补偿方法202010369114.9.

      7.   美国发明,伍文杰,蔡冰洋,高乐,王元蕾,涂良成, VARIABLE-AREA COMB CAPACITOR-BASED MEMS RELATIVE GRAVIMETER PROBE ANDGRAVIMETER, US11262474 B2



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