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个人信息Personal Information
副教授 硕士生导师
性别：男
在职信息：在职
所在单位：物理学院
学历：研究生(博士)毕业
学位：理学博士学位
毕业院校：华中科技大学
学科：精密测量物理
- A high-resolution area-change-based capacitive MEMS tilt sensor.Sensors and Actuators, A: Physical,
- A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer.Sensors and Actuators, A: Physical,
- Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.SENSORS,
- Liu Dandan,刘骅锋,刘金全,胡方靖,范继.伍文杰,涂良成.Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.[J].Sensors,2020,
- 伍文杰,Zheng Panpan,刘金全,Li Zhu,范继,刘骅锋.涂良成.High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.[J].Sensors,2017,
- 伍文杰,刘金全,范继,彭丹花,刘骅锋.涂良成.A nano-g micromachined seismic sensor for levelling-free measurements.[J].Sensors and Actuators A: Physical,2018,
- 伍文杰,Liu Dandan,Qiu Wenrui,刘骅锋,胡方靖.胡宸源,Fan Ji,Tu Liangcheng.A precise spacing-control method in MEMS packaging for capacitive accelerometer applications.[J].Journal of Micromechanics and Microengineering,2018,
- Yan Shitao,Liu Huafeng,Xu Qiangwei,Liu Dandan,Zhang Mengqi.Wu Wenjie,Tu Liangcheng.A method for improving out-of-plane robustness of an area-changedcapacitive displacement transducer used in a micro-accelerometer.[J].Sensors and Actuators A: Physical,2020,(1):
- Wu Wenjie,Liu Dandan,Liu Huafeng,Yan Shitao,Tang Shihao,Hu Fangjing,Fan Ji.Tu Liangcheng.Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism.[J].Journal of Microelectromechanical Systems,2020,(5):1-10
- 伍文杰,Zhu Tao,刘金全,范继.涂良成.Polyimide-damage-free, CMOS-compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation.[J].Journal of Electronic Materials,2014,(3):
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