Bin Shan

2025-5-17,Saturday

·Paper Publications

Current position: 英文主页 > Scientific Research > Paper Publications
9) X.L. Wang, Y. Li, J.L. Lin, B. Shan, and R. Chen*, “Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition”, Review of Scientific Instruments, 88 (2017) 115108
Release time:2018-06-20  Hits: