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Influence of Species Transport and Inlet Condition on the MOCVD-Grown GaN Uniformity[C]
Release time:2019-05-30  Hits:

Indexed by: Essay collection

First Author: Zhi Zhang

Correspondence Author: Zhiyin Gan;Haisheng Fang

Journal: Proceedings of the ASME 2016 International Mechanical Engineering Congress and Exposition

Included Journals: EI

Document Type: C

Volume: 8

Page Number: V008T10A050