华中科技大学主页平台管理系统 LI ZHEN--英文主页-- Exposure strategy and crystallization of Ge-Sb-Te thin film by maskless phase-change lithography

LI ZHEN

Recommended Ph.D.Supervisor Recommended MA Supervisor

·Paper Publications

Current position: 英文主页 > Scientific Research > Paper Publications

Exposure strategy and crystallization of Ge-Sb-Te thin film by maskless phase-change lithography

Release time:2020-11-30 Hits:

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Metallic resist for phase-change lithography, Scientific Reports