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71) Wenjie He, Bo Chu, Rui Gu, Haitao Zhang, B. Shan, Rong Chen*, “The Application of Generalized Predictive Control in the Radiant Heating Atomic Layer Deposition Reactor”, IEEE ISAM Proc. 2013
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上一条:72) K. Cao, Z.L. Ren, S.M. Xiang, B. Shan, and R. Chen*, “Atomic layer deposition of nanoparticles on self-assembled monolayer modified silicon substrate” Mater. Res. Soc. Symp. Proc., Vol. 1546, (2013) DOI:10.1557/opl.2013.631
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