Liangcheng Tu

·Paper Publications

Current position: 英文主页 > Scientific Research > Paper Publications
02 Xiao-Xiao Song, Qiu Wang, Hua-Feng Liu, Guang-Bin Dou, Hao Li, Wen-Jie Wu, Fang-Jing Hu*, Ji Fan, Jin-Quan Liu and Liang-Cheng Tu. A method for alleviating the effect of pinhole defects in inter-metal dielectric films. J. Micromech. Microeng. 29 (2019) 015012. (6pages)
Release time:2019-03-16  Hits: