·Paper Publications
Zheng Ying, Lin Dan, Wang Yanwei, Jang Shi-Shang, Tao Bo. Model quality evaluation in semiconductor manufacturing process with EWMA run-to-run control. IEEE Transactions on Semiconductor Manufacturing, 2017, 30(1): 8-16.
Release time:2018-03-22  Hits:
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Lin Dan, Zheng Ying, Zhang Hong, Yang Weidong, Tao Bo. Detection of model-plant mismatch in closed-loop control system. Journal of Process Control, 2017, 57: 66-79. (Corresponding Author)
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Zheng Ying, Mao Simin, Liu Shujie, Wong David Shan-Hill, Wang Yan-Wei. Normalized relative RBC based minimum risk bayesian decision approach for fault diagnosis of industrial process. IEEE Transactions on Industrial Electronics, 2016, 63(12): 7723-7732.