Ying Zheng

·Paper Publications

Current position: 英文主页 > Scientific Research > Paper Publications
Zheng Ying, Lin Dan, Wang Yanwei, Jang Shi-Shang, Tao Bo. Model quality evaluation in semiconductor manufacturing process with EWMA run-to-run control. IEEE Transactions on Semiconductor Manufacturing, 2017, 30(1): 8-16.
Release time:2018-03-22  Hits: