Zhu Guangzhi
·Research Projects
面向极紫外光刻的脉冲CO2激光种子源技术研究
Release time:2023-06-13 Hits:
Classification of Disciplines: Engineering
First-Level Discipline: Other specialties in Optical Engineering
Date of Project Approval: 2022-01-01
Scheduled completion time: 2025-01-01