个人信息
Personal information
教授 博士生导师 硕士生导师
性别：男
在职信息：在职
所在单位：物理学院
学历：研究生(博士)毕业
学位：理学博士学位
毕业院校：华中科技大学
学科：无线电物理精密测量物理
- [11] 019 Jin-Quan Liu , Chao Wang , Tao Zhu , Wen-Jie Wu , Ji Fan and Liang-Cheng Tu*, Low temperature fabrication and doping concentration analysis of Au/Sb Ohmic contacts to n-type Si, AIP Advances, 5 (2015) 117112 .
- [12] 018 Ji Fan, Tao Zhu, Wen-Jie Wu, Shi-Hao Tang, Jin-Quan Liu and Liang-Cheng Tu*, Low temperature photosensitive polyimide based insulating layer formation for microelectromechanical systems applications. Journal of Electronic Materials, 44 (2015) 4891-4897 (7pages).
- [13] 017 Ji Fan, Wen-Ting Zhang, Jin-Quan Liu, Wen-Jie Wu, Tao Zhu and Liang-Cheng Tu*, Fabrication of high aspect ratio structure and its releasing for silicon on insulator MEMS/MOEMS device application. J. Micro/Nanolith. MEMS MOEMS 14(2015) 024502 (6pages).
- [14] 016 Wen-Jie Wu, Tao Zhu, Jin-Quan Liu, Ji Fan and Liang-Cheng Tu*, Polyimide-Damage-Free, CMOS-Compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation. Journal of Electronic Materials, 44 (2015) 991-998 (8pages).
- [15] 015 Zhu Li, Wen-Jie Wu, Pan-Pan Zheng, Jin-Quan Liu, Ji Fan, and Liang-Cheng Tu*, Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications. Micromachines, 7 (2016) 167. (15pages).
- [16] 014 Wen-Hai Tan, Shan-Qing Yang, Cheng-Gang Shao, Jia Li, An-Bin Du, Bi-Fu Zhan, Qing-Lan Wang, Peng-Shun Luo, Liang-Cheng Tu, and Jun Luo, New Test of the Gravitational Inverse-Square Law at the Submillimeter Range with Dual Modulation and Compensation. Phys. Rev. Lett. 116 (2016), 131101. (15pages).
- [17] 013 Wen-Jie Wu, Pan-Pan Zheng, Jin-Quan Liu, Zhu Li, Ji Fan, Hua-Feng Liu and Liang-Cheng Tu*, High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer. Sensors, 17 (2017) 2158. (15pages).
- [18] 012 Ji Fan, Rui-Yuan Xing, Wen-Jie Wu, Hua-Feng Liu, Jin-Quan Liu and Liang-Cheng Tu*, Low-stress photosensitive polyimide suspended membrane for improved thermal isolation performance. J. Micromech. Microeng. 27 (2017) 115013. (7pages).
- [19] 011 Xiang-Qing Huang, Zhong-Guang Deng, Ya-Fei Xie, Zhu Li, Ji Fan and Liang-Cheng Tu*, A New Scale Factor Adjustment Method for Magnetic Force Feedback Accelerometer. Sensors, 17 (2017) 2471. (8pages).
- [20] 010 Shi-Tao Yan, Ya-Fei Xie, Meng-Qi Zhang, Zhong-Guang Deng, and Liang-Cheng Tu*, A Subnano-g Electrostatic Force-Rebalanced Flexure Accelerometer for Gravity Gradient Instruments, Sensors, 17 (2017), 2669. (14pages).