面向亚ng精度MEMS加速度计的水平准零刚度结构研究
- Status:在研
- Supported by:National Natural Science Foundation of China (NSFC)
- Project level:National
- Project Number:2019T120660
- Date of Project Approval:2020-01-29
- Scheduled completion time:2022-12-29
- Subsidy Amount:26.0
Pre One:
基于微悬臂原子力 光学测量的高分辨力加速度传感新机制