Release time:2020-06-09 Hits:
- Indexed by:Journal paper
- Correspondence Author:Wu Wenjie,Tu Liangcheng
- Co-author:Yan Shitao,LIU HUAFENG,Xu Qiangwei,Liu Dandan,Zhang Mengqi
- Journal:Sensors and Actuators A: Physical
- Included Journals:SCI、SSCI
- Discipline:Engineering
- First-Level Discipline:Electronic Science And Technology
- Document Type:J
- Volume:312
- Issue:1
- Key Words:Out-of-plane robustness Area-changed capacitive displacementtransducer On-chip capacitorMicro-celerometer MEMS
- DOI number:10.1016/j.sna.2020.112156
- Date of Publication:2020-07-09
- Impact Factor:2.904
- Abstract:tArea-changed capacitive displacement transducers have been widely applied in micro-electro-mechanical-system (MEMS) sensors such as sandwich-type MEMS accelerometers to detect in-planedisplacement with a high sensitivity. The cross-axis disturbance could result in out-of-plane displacementof the proof mass, which brings a gap variation of sensing capacitor electrodes and lead to an undesirablevariation of the accelerometer’s scale factor. In order to solve this problem, this paper presents a novelmethod to improve out-of-plane robustness of an Area-changed capacitive displacement transducer in aMEMS accelerometer. An on-chip capacitor, sensitive to the out-of-plane displacement of proof mass, wasintegrated as the feedback capacitor of the charge amplifier. Thus, the influence of the out-of-plane dis-placement on the scale factor caused by cross-axis disturbance is compensated. The method was verifiedby theoretical calculation, simulation and experiments. The results indicated that the cross-sensitivityof the MEMS accelerometer with an on-chip feedback capacitor was less than 1/3 of that with off-chipfeedback capacitor when acceleration was applied on the out-of-plane direction. Besides, the noise floorof the accelerometer maintained at 60 ng/√Hz regardless of the on-chip or off-chip feedback capacitors.
