Release time:2021-07-08 Hits:
- Indexed by:Journal paper
- First Author:WU WENJIE
- Correspondence Author:tuliangcheng
- Co-author:Zheng Panpan,LIU JIN QUAN,Li Zhu,FAN JI,LIU HUAFENG
- Journal:Sensors
- Included Journals:SCI、SSCI
- Discipline:Engineering
- First-Level Discipline:Electronic Science And Technology
- Document Type:J
- Volume:17
- Key Words:capacitive sensor; area-changed; parasitic capacitance; fringe effect; sensitivity improvement; micro accelerometer
- DOI number:10.3390/s17092158
- Date of Publication:2017-09-18
- Abstract:Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers.
Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method
involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/pHz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/pHz at 1Hz.The earthquake that occurred in Taiwan was also detected during a continuous gravity easurement
