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论文类型：期刊论文

第一作者：伍文杰

通讯作者：涂良成

合写作者：郑盼盼,刘金全,李祝,范继,刘骅锋

发表刊物：Sensors

收录刊物：SCI、SSCI

学科门类：工学

一级学科：电子科学与技术

文献类型：J

卷号：17

关键字：capacitive sensor; area-changed; parasitic capacitance; fringe effect; sensitivity improvement; micro accelerometer

DOI码：10.3390/s17092158

发表时间：2017-09-18

摘要：Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/pHz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/pHz at 1Hz.The earthquake that occurred in Taiwan was also detected during a continuous gravity easurement