伍文杰
A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer
点击次数:
发表刊物:Sensors and Actuators, A: Physical
ISSN号:0924-4247
影响因子:2.904
点击次数:
发表刊物:Sensors and Actuators, A: Physical
ISSN号:0924-4247
影响因子:2.904