·Paper Publications
Getter free vacuum packaging for MEMS
Release time:2019-05-30 Hits:
Indexed by: Journal paper
First Author: Zhiyin Gan
Correspondence Author: Sheng Liu
Journal: Sensors and Actuators A: Physical
Included Journals: SCI
Volume: 149
Issue: 1
Page Number: 159-164
Getter free vacuum packaging for MEMS.pdf