·Paper Publications
Study on triple-stack anodic bonding using two electrodes
Release time:2019-05-30 Hits:
Indexed by: Journal paper
First Author: Tingkai Zhang
Correspondence Author: Zhiyin Gan
Journal: Sensors and Actuators A: Physical
Included Journals: SCI
Volume: 157
Issue: 1
Page Number: 168-172
Study on triple-stack anodic bonding using two electrodes.pdf