Laser-driven hierarchical "gas-needles" for programmable and high-precision proximity transfer printing of microchips
发布时间：2024-06-03
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- 论文类型：
- 期刊论文
- 第一作者：
- Furong Chen
- 通讯作者：
- YongAn Huang,Jing Bian
- 合写作者：
- Mengxin Gai,Ningning Sun,Lei Liu,Zhangyu Xu,Haiyang Yu
- 发表刊物：
- Science Advances
- 项目来源：
- the National Natural Science Foundation of China (grant nos. 51925503, 52105576 and 52188102), etc.
- 卷号：
- 9
- 期号：
- 43
- DOI码：
- 10.1126/sciadv.adk0244
- 发表时间：
- 2023-10-27
- 摘要：
- Micro–transfer printing (μTP) techniques are essential for advanced electronics. However, current contact/noncontact μTP techniques fail to simultaneously achieve high selectivity and transfer accuracy. Here, a laser projection proximity transfer (LaserPPT) technique is presented, which assembles the microchips in an approach-and-release manner, combining high-precision parallelism with individual chip control. An embedded carbon layer with a thin gas layer is generated by an ultraviolet laser, followed by absorbing heat from the infrared laser, to enable the sequential expansion of hierarchical “gas-needles.” The level 1 large gas-needle with a substantially growing height can reduce the gap between the microchip and the receiver. Then, the level 2 small gas-needles enable the gentle release of a chip. Therefore, the LaserPPT can obtain a strong adhesion modulation (~1000 times), excellent size scalability (<100 micrometers), and high transfer accuracy of ~4 micrometers. Last, the assembly of a micro–light-emitting diode display demonstrates the capabilities for deterministic assembly of microarrays.