|
34) Z. Deng, W.J. He, C.L. Duan, B. Shan, and R. Chen*, “Atomic Layer Deposition Process Optimization by Computational Fluid Dynamics”, Vacuum, 123 (2016) 103-110
点击次数：
上一条：35) Z. Deng, W.J. He, C.L. Duan, R. Chen*, and B. Shan, “Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition”, Journal of Vacuum Science & Technology A, 34 (2016) 01A108
下一条：33) Q. Peng, J. Wang, Y.W. Wen*, B. Shan, R. Chen*, “Surface modification of LaFeO3 by Co-Pi electrochemical deposition as an efficient photoanode under visible light”, RSC Adv., 6 (2016) 26192-26198