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35) Z. Deng, W.J. He, C.L. Duan, R. Chen*, and B. Shan, “Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition”, Journal of Vacuum Science & Technology A, 34 (2016) 01A108
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下一条：34) Z. Deng, W.J. He, C.L. Duan, B. Shan, and R. Chen*, “Atomic Layer Deposition Process Optimization by Computational Fluid Dynamics”, Vacuum, 123 (2016) 103-110