论文类型：期刊论文
论文编号：100353
第一作者：肖汉平,赵晋彪
通讯作者：鲁平,司马朝坦
合写作者：张江山,刘德明
发表刊物：Photoacoustics
收录刊物：SCI、EI
学科门类：工学
一级学科：光学工程
文献类型：J
卷号：26
ISSN号：2213-5979
关键字：Infrared; Photoacoustic spectroscopy; Fiber-optic microphone; Gas detection
DOI码：10.1016/j.pacs.2022.100353
发表时间：2022-04-01
影响因子：8.484
摘要：In this paper, we propose and experimentally demonstrate an ultra-sensitive all-optical PAS gas sensor, incorporating with a near-infrared (NIR) diode laser, novel fiber-optic microphones (FOMs) and a double channel differential T-type photoacoustic cell. The fiber-optic microphoneFOM is realized by Fabry-Perot (FP) interferometry and novel gold-chromium (Au-Cr) composite nanomem-branes. To meet the demand of high sensitivity and flat frequency response for FOMs, the Au-Cr composite diaphragm is proposed anddeliberately designed by the diaphragm forced vibration principle and fabricated by E-beam evaporation deposition with 330 nm in thickness and 6.35 mm in radius. Experimental results show that the optical microphoneFOM has a sensitivity of about 30 V/Pa and a flat frequency response from 300 to 900 Hz with fluctuation below 1 dB. Moreover, a double channel differential T-type pho-toacoustic cell is designed and employed in the all-optical PAS gas sensor, with the first-order resonant frequency of 610 Hz. The all-optical gas sensor is established and verified for CH4 detection and the normalized noise equivalent absorption (NNEA) is 4.42×10-10 W∙cm-1∙Hz-1/2, which shows optimum among previously reported optical PAS methane sensors so far. The minimum de-tection limit (MDL) of 36.45 ppb is achieved with a 1 s integration time. The MDL could be further enhanced to 4.87 ppb with an integration time of 81 s, allowing ultra-sensitive trace gas detection
发布期刊链接：https://www.sciencedirect.com/science/article/pii/S2213597922000222