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Study on the work function of GeTe/Sb_2Te_3 superlattice-like films for application of phase change memory
Release time:2023-08-21  Hits:

Indexed by: 会议

First Author: 钱航

Correspondence Author: 缪向水

Co-author: 周凌珺,TONG HAO

Journal: The International Photonics and optoelectronics Meeting

Affiliation of Author(s): 华中科技大学

Discipline: Engineering

First-Level Discipline: Electronic Science And Technology

Document Type: C

Volume: 2A

Issue: 1

Key Words: Multilayer design; Thin film devices and applications

DOI number: 10.1364/ISST.2017.ISu2A.1

Date of Publication: 4304-02-01

Abstract: We prepared GeTe/Sb2Te3 superlattice-like (SLL) structure phase change films and got better phase change performance than GeTe. Experiments confirmed the contrast of work function (WF) between SLL and conventional materials.

Links to published journals: https://doi.org/10.1364/ISST.2017.ISu2A.1