Liangcheng Tu
·Paper Publications
017 Ji Fan, Wen-Ting Zhang, Jin-Quan Liu, Wen-Jie Wu, Tao Zhu and Liang-Cheng Tu*, Fabrication of high aspect ratio structure and its releasing for silicon on insulator MEMS/MOEMS device application. J. Micro/Nanolith. MEMS MOEMS 14(2015) 024502 (6pages)
Release time:2019-03-16 Hits:
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018 Ji Fan, Tao Zhu, Wen-Jie Wu, Shi-Hao Tang, Jin-Quan Liu and Liang-Cheng Tu*, Low temperature photosensitive polyimide based insulating layer formation for microelectromechanical systems applications. Journal of Electronic Materials, 44 (2015) 4891-4897 (7pages)
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016 Wen-Jie Wu, Tao Zhu, Jin-Quan Liu, Ji Fan and Liang-Cheng Tu*, Polyimide-Damage-Free, CMOS-Compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation. Journal of Electronic Materials, 44 (2015) 991-998 (8pages)