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[6]. 发明名称:微型皮拉尼计与体硅器件集成加工的方法;发明人:范继、涂良成、刘金全、王超;申请号/专利号:ZL201410464700.6,申请日:2014-09-12,授权公告日:2016-04-20
[4]. 发明名称:一种深硅刻蚀方法;发明人:涂良成、伍文杰、范继、刘金全、罗俊;申请号/专利号:ZL201410140457.2,申请日:2014-04-09,授权公告日:2016-01-20