基于新型准零刚度结构的亚ng分辨率MEMS加速度计研究
Release time:2022-07-29 Hits:
Status:在研
Supported by:中国博士后基金会
Project level:National
Project Number:2019T120660
Date of Project Approval:2019-07-29
Scheduled completion time:2020-12-29
Subsidy Amount:18.0