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论文类型：期刊论文

第一作者：伍文杰

通讯作者：涂良成

合写作者：刘丹丹,刘骅锋,严世涛,唐世豪,胡方靖,范继

发表刊物：Journal of Microelectromechanical Systems

收录刊物：SCI、SSCI

学科门类：工学

一级学科：电子科学与技术

文献类型：J

卷号：29

期号：5

页面范围：1-10

ISSN号：1057-7157

关键字：Inertial sensor, microsensor, quasi-zero stiffness, tidal tilt

DOI码：10.1109/JMEMS.2020.3001928

发表时间：2020-06-09

影响因子：2.534

摘要：High-precision microelectromechanical inertial sensors based on spring-mass structures are of great interests for a wide range of applications, including inertial navigation, disaster warning and resource exploration. Lowering the resonant frequency is essential to further improve the sensitivity of the sensors. However, conventional approaches are facing insurmountable difficulties from size reduction to machining precision. This paper proposed a novel quasi-zero-stiffness mechanism that is compatible with MEMS technologies together with a micromaching approach for adjusting the stiffness precisely. By improving the compliance of a typical spring with a negativestiffness compensation mechanism induced by axial force, the resonant frequency of the micro spring-mass structure is lowered to 0.7 Hz, which is at least 3 times lower than current stateof- the-art micro structures. Based on this ultra-sensitive micro structure base on the quasi-zero-stiffness mechanism, the micro inertial sensor, with a chip size of a postage stamp, has shown a low self-noise of 0.6 nrad/