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论文类型：期刊论文

通讯作者：伍文杰,涂良成

合写作者：严世涛,刘骅锋,许强伟,刘丹丹,张梦琪

发表刊物：Sensors and Actuators A: Physical

收录刊物：SCI、SSCI

学科门类：工学

一级学科：电子科学与技术

文献类型：J

卷号：312

期号：1

关键字：Out-of-plane robustness Area-changed capacitive displacementtransducer On-chip capacitorMicro-celerometer MEMS

DOI码：10.1016/j.sna.2020.112156

发表时间：2020-07-09

影响因子：2.904

摘要：tArea-changed capacitive displacement transducers have been widely applied in micro-electro-mechanical-system (MEMS) sensors such as sandwich-type MEMS accelerometers to detect in-planedisplacement with a high sensitivity. The cross-axis disturbance could result in out-of-plane displacementof the proof mass, which brings a gap variation of sensing capacitor electrodes and lead to an undesirablevariation of the accelerometer’s scale factor. In order to solve this problem, this paper presents a novelmethod to improve out-of-plane robustness of an Area-changed capacitive displacement transducer in aMEMS accelerometer. An on-chip capacitor, sensitive to the out-of-plane displacement of proof mass, wasintegrated as the feedback capacitor of the charge amplifier. Thus, the influence of the out-of-plane dis-placement on the scale factor caused by cross-axis disturbance is compensated. The method was verifiedby theoretical calculation, simulation and experiments. The results indicated that the cross-sensitivityof the MEMS accelerometer with an on-chip feedback capacitor was less than 1/3 of that with off-chipfeedback capacitor when acceleration was applied on the out-of-plane direction. Besides, the noise floorof the accelerometer maintained at 60 ng/√Hz regardless of the on-chip or off-chip feedback capacitors.