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Rong Chen
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Research Projects
Fundamental Principles and Enabling Technologies for Ordered Atomic Layer Growth in Stacked Structures,National Natural Science Foundation of China,92580206,2026-01-01-2029-12-31
New principles and methods to construct three-dimensional sub-nanometer structures for integrated circuits towards advanced technology nodes,National Natural Science Foundation of China,52350349,2024-01-01-2026-12-31
Development of selective atomic layer deposition processes and equipment for advanced chip manufacturing processes,National Key R&D Program of China,2022YFF1500400,2022-11-01-2024-10-31
Research on cross-scale manufacturing method of atomic layer deposition for stabilization of flexible quantum dot display,National Natural Science Foundation of China,51835005,2019-01-01-2023-12-31
Rational design and performance tuning of efficient metal-oxide composite catalysts,National Key Research and Development Program (Youth Project),2013CB934800,2013-01-01-2017-09-30
Atomic-scale collaborative manufacturing method for advanced integrated circuit processes below 5nm,Tencent Public Charity Foundation,XPLORER-2021-1036,2021-05-04-2026-12-31
Design and fine preparation of high-efficiency water-gas shift reaction nanocatalysts based on selective atomic layer deposition,International (Regional) Cooperation and Exchange Project of National Natural Science Foundation of,51911540476,2019-01-01-2021-12-31
Basic research on spatially isolated atomic layer deposition system for flexible electronics manufacturing,General Project of National Natural Science Foundation of China,51575217,2016-01-01-2019-12-31
Atomic-scale manufacturing and measurement,Innovative Group Project of Hubei Provincial Natural Science Foundation,2020CFA030,2020-01-01-2023-03-31
Research on key technologies and equipment for atomic layer coating of micro-nano particles,Natural Science Foundation of Hubei Province,2015CFA034,2015-05-21-2017-12-31
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