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Rong Chen

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Professor  
Supervisor of Doctorate Candidates  
Supervisor of Master's Candidates  

Paper Publications

Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer deposition

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Indexed by:Journal paper

First Author:Xiaolei Wang

Correspondence Author:Bin Shan, Rong Chen

Co-author: Yun Li, Jilong Lin

Journal:Rev. Sci. Instrum.

Included Journals:SCI

Document Type:J

Volume:88

Page Number:115108

Date of Publication:2017-11-23

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