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Rong Chen

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一种纳米颗粒空间原子层沉积连续包覆装置及方法

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:但威,LI YUN,曲锴,巴伟明,陈蓉,Bin Shan,邓章,周雪琪,曹坤,何文杰

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201710423764.5

Number of Inventors:6

Authorization Date:2017-06-07

First Author:Rong Chen,Rong Chen

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