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Rong Chen

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Patents

一种循环卷绕式原子层沉积设备

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Affilication of Author(s):华中科技大学

School Sign:华中科技大学

Patent Applicant:但威,陈蓉,文艳伟,Bin Shan,巴伟明,段晨龙,竹鹏辉

Disigner of the Invention:华中科技大学

Type of Patent:Invent

Authorization number:ZL201710193000.1

Number of Inventors:4

Authorization Date:2017-03-28

First Author:Rong Chen,Rong Chen

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